Looking forward to exploring the future of Automation with you
Semiconductor
PC-based semiconductor cleaning solution
Background of the project
In the semiconductor manufacturing process, semiconductor cleaning runs through the entire processing process. Chemical liquids are usually used to clean the surface film layer of the semiconductor. After the chemical liquid is used to clean the surface of the semiconductor, deionized water is used to rinse the semiconductor surface. , to remove the chemical liquid attached to the semiconductor surface and prevent the residue of the chemical liquid or cleaning product from affecting the subsequent processing technology or the formation of the semiconductor device.
System specification
Tujian Automation combines BECKHOFF's PC-based control platform, rich remote IO stations, and powerful software platform capabilities to provide a perfect solution for semiconductor cleaning equipment. The use of TwinCAT HMI brings customers a new web-based human-computer interaction experience. With the help of IoT technology, batch deployment and remote maintenance of equipment can be easily realized.
System framework structure
The program framework and hardware topology are standardized and framed, and can be easily expanded to multiple cavities. With Beckhoff thermal connection technology, the system can be expanded as desired.
Solution advantages
Stability: Using Beckhoff products is stable and reliable. EtherCAT cable redundancy improves system reliability;
Compatibility: EtherCAT fieldbus, compatible with all third-party EtherCAT slave stations and other fieldbus products;
Scalability: modular programming design, flexible and convenient expansion;
Rich interfaces: Integrated SECS/GEM standard interface, equipment connection is convenient and easy to use.
Summarize
Tujian Automation combines the product advantages of Beckhoff to provide PC-based semiconductor cleaning solutions, which simplifies the complexity of the system and improves system stability and efficiency.
Looking forward to exploring the future of Automation with you
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